Structured Substrates

Thin Film on 4” / 6” / 12” / 24” square substrates

We deposit our thin films on different substrates depending on your demand. The Substrates can be as big as 24” x 24” square.

The thin films are produced by different methods:

Substrate material:Al2O3, AlN, glass, metals (Mo, steel), polyimide
Deposition and Structuring

4“ / 6“ / 12“ / 24“

Sputtering: Cu, Ni, Au, NiCr, Ti, Cr, Pd, Pt, Sn, Nb, W90%Ti10%, Al
Electroplating: Cu, Ni, Au, Pt
Spinning

Laser Direct Imaging (LDI)
Mask-Aligner
Stripping & Etching